Thermally Excited Resonating Membrane Mass Flow Sensor

A mass flow sensor based on the frequency shift of a resonating microstructure is being developed, using a measurement principle of the thermoanemometry type. The sensor is to be applied for mass flows up to 10 standard cubic centimeters per minute (sccm; 10sccm = 0.17 mg s-1), with a high sensitivity, a high resolution and a fast response. Here we report on the first prototype consisting of a 2 μm thick membrane: the temperature elevation of the thermally excited vibrating membrane affects its resonance frequency. The three-dimemsional heat transfer within the membrane and the mass flow is modeled, and expressions are derived for the resonance frequencies of initially curved and stressed membranes. Experiments have been carried out for nitrogen flows of up to 500 sccm passing over thermally excited membranes. Predicted and measured values for the shift of the resonance frequency agree well. The sensitivity of the average temperature elevation to the mass flow is quite small: at 10 sccm the cooling effect of the mass flow is only 0.2% of the heat loss by conduction to the substrate. At a resonance frequency of 5.0 kHz, and an average temperature elevation of the mebrane of 8°C, this still leads to a frequency change of 13 Hz in the mass flow range from zero to 10 sccm. Suggestions are presented for increasing the sensitivity of the sensor

Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges

This paper describes the various design aspects for micromechanical sensors consisting of a structure with encapsulated built-in resonant strain gauges. Analytical models are used to investigate the effect of device parameters on the behaviour of a pressure sensor and a force sensor. The analyses indicate that the sealing cap can have a strong degrading effect on the device performance if the thicknesses of the cap and of the supporting structure are of the same order of magnitude. A novel design, employing bossed structures, is described, which reduces the design complexity and virtually eliminates the influence of the cap on the sensitivity of the sensor

A differential resonator design using a bossed structure for applications in mechanical sensors

Theory and experimental results are presented of a differential resonator design employing a bossed structure for applications in mechanical sensors. The effects of residual strain, temperature and mechanical load on the resonance frequency are investigated. Mismatches in the resonators are accounted for in the analysis, resulting in a predicted temperature dependence of the offset and of the sensitivity. Experimental data obtained from a macroscopic brass model, mounted on a steel bar and applied as a force sensor, are given. Compared to a design employing a single resonator, the measurements indicate a doubling in force sensitivity and a reduction of both the intrinsic temperature dependence and of the differential thermal expansion effects. The results of this research are directly applicable to micromachined structures in silicon